| Acceleration
Voltage |
80
and 120 kV |
| Illumination
System |
Highly
flexible advanced Koehler illumination system |
| Objective
Lenses |
Truly symmetrical
type Resolution Point - Point: 0.34 nm Information Limit:
<0.20 nm STEM: <0.50 nm |
| Spectrometer
|
Lifetime
factory aligned In-column OMEGA type Dispersion: 1.17 µm/eV
@ 120 kV Energy resolution: <1.5 eV Distortion: < ±1.0%
Acceptance angle: 80 mrad at Δ =±6 eV Isochromaticity:
<1.0 eV in 2.5 µm O |
| Specimen
Stage |
5-axes
fully eucentric goniometer Tilt range α/β: ±75° / ±30°
|
| Imaging System
|
Magnification
zoom for imaging, diffraction and spectroscopy with 5 imaging
lenses and OMEGA spectrometer. |
| Magnification
|
TEM: 8
- 630,000x STEM: 50 - 1,000,000x EELS: 20 - 315x |
| Modes of
Operation |
EFTEM:
Global and elastic BF/DF/Low Dose (elemental and structure
sensitive contrast) Analysis: EELS, ESI, Image EELS, EDS Diffraction:
Global and elastic SAED, CBED, LACBED, micro-ED STEM: SE,
BSE, HAADF, BF, DF, SI, EDS |
| Vacuum System
|
Completely
oil-free with integrated cold-trap
•Pre-vacuum
scroll pump with buffer tank
•Split-flow TMP for
viewing chamber, filter, specimen and emitter.
•
Differential system with IGP (50 l/sec) for emitter area (optional)
|
| System Control
|
Win™
Graphical User Interface (GUI) with Windows®XP, operated
by mouse, keyboard and dedicated control panels. |
|
|
