SEA6000VX  Analysis Examples |
Contaminant Analysis Example 3: Detection of microscopic sized contaminants |
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The SEA6000VX HS Finder is able to detect contaminants too small to see by the unaided eye. Within a short period of time, areas that contain contaminants are specified, spectra of the contaminants displayed, and a quantitative report produced. With some additional time, a vivid mapping image can be obtained by mapping.
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[Example of microscopic contaminant detection in a wide area]
70 µm iron (Fe) contaminant not visually verifiable was detected by a 3 minute mapping measurement of a 100mm×100mm measurement area (Figure 2). A detailed mapping image was obtained with a 3 minute measurement of area A in Figure 2 using a micro-sized beam (Figure 3). Detailed mapping clarifies that a contaminant seen as one point by easy mapping is actually two points. Further, detail information about analysis results can be obtained because a spectrum can be displayed for any measurement location (Figure 4).
Figure 1. Sample Image |
＜Measurement Conditions＞
| Voltage: |
50kV |
| Current:: |
1000µA |
| Primary filter: |
OFF |
| Beam size: |
1.2mm (for easy mapping)
0.2mm (for detailed mapping) |
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Figure 2. Fe Mapping Image
(3 minute easy mapping) Measurement area: 100×100mm |
Figure 3. Fe Mapping Image
(3 minute detailed mapping) Measurement area: 1×1mm |
Figure 4. Spectrum of measured location
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[Example of detecting microscopic sized contaminants]
In Figure 2, area B, which is dense with Fe, is mapped for 30 minutes by a microscopic beam, resulting in a detailed mapping image (Figure 5). By specifying the size of a grain of Fe in area C using a high precision optical microscope (Figure 6), we confirmed a size of 50µm. The ability to confirm even smaller mapping images allows detection of contaminants smaller than 50µm.
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Figure 5. Fe Mapping Image
(30 minute detailed mapping)
Measurement area: 10×10mm |
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Figure 6. High resolution microscope image of contaminated area |
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