1. Easy setting Optical image of the sample automatically appeared on the display once the sample placed on the stage. 2. 50nm Au plating thickness can be measured precisely in 10 seconds Optimum geometry realize higher sensitivity even under micro beam, which enables better measurement accuracy with round 0.1 or 0.2 mm collimator.

3. Measurement without the standard sample. Measurement can be done without thickness standard sample(s) by expanding the FP software. Measurement of multilayer film and alloy film can be done easily. 4. Easy positioning by Wide View System New Wide View System (option) which enable to observe the whole sample image (size max. 250x200mm), makes easy setting of the measurement position.