The ULTRA 55 represents the latest development in GEMINI technology. Based on the SUPRA 55, the ULTRA 55 now comprises a fully integrated Energy and angle selective Backscattered electron (EsB) detector. The ULTRA 55 offers ultra high resolution for both SE to image surface information and BSE to present compositional information. The new EsB detector features an integrated filtering grid to enhance image quality and requires no additional adjustments.
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Combining several instruments in one, the SUPRA 55VP with the improved GEMINI column is a true nanoscience FESEM. It provides ultra high resolution imaging over the complete voltage range with the ability to handle large awkwardly shaped specimens. It is also a fully analytical FESEM with up to 20nA probe current available and comprises variable pressure technology for examining non-conducting specimens without prior time consuming preparation.
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The EVO series scanning electron microscopes (SEM) has been designed to deliver the most informative images in all applications. Applications like materials development, quality control, forensics, MEMS, lithography, life and bio sciences, archeological etc. all benefit from the compact column design and advanced imaging modes. Class-leading X-ray analysis capabilities makes the EVOŽ most effective analytical SEM currently available.
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As a laboratory tool compatible with samples below 100nm, this system is designed to be used in wide range of fields including material analysis, semiconductor and life science. Equipped with SIINT FIB column and Carl Zeiss EB column, it enables high-quality TEM sample preparation and high throughput performance.
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FIB-SEM hybrid system equipped with SIINT's latest FIB column and Gemini SEM
colulmn of Carl Zeisss, and FIB-SEM-Ar Triple Beam system equipped with ultra low kV Ar column which can handle the small sample to 200mm wafer deliver such as high quality TEM sample preparation, Cut&See realtime high resolution obervation and 3D analysis, and EDS analysis.

Based on the high performance automation platform of SIINTLs SMI3000SE/TB Double Beam/Triple Beam platform, this new product is equipped with the GeminiR electron optics of Carl Zeiss NTS to offer 3 nm SEM resolution and 4 nm SEM resolution. Inheriting all the user-centric functionality of the SMI3000 series, XVision 300 is an essential tool for process monitoring in cleanrooms as well as for wafer-level failure analysis in the wafer fab laborato-ries.

The all new LIBRA range of Energy Filtering Transmission Electron Microscopes (EFTEM) combine state of the art electron optics with unique Koehler illumination, OMEGA In-column energy filtering, extremely stable digital electronics and genuine ease of operation through the WinTEM graphical user interface (GUI). The LIBRA 200 FE is the first EFTEM combining the new In-column corrected OMEGA energy filter, the unique Koehler illumination, and a highly efficient field emission emitter. The excellent performance ensures that the operator obtains optimum results in semiconductor, materials analysis and life science research.
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The all new LIBRA range of Energy Filtering Transmission Electron Microscopes (EFTEM) combine state of the art electron optics with unique Koehler illumination, OMEGA In-column energy filtering, extremely stable digital electronics and genuine ease of operation through the WinTEM(TM) graphical user interface (GUI). The LIBRA 120 EFTEM, with a LaB6 or Tungsten source, provides excellent image contrast even from thick or unstained thin specimens. The optimum detector flexibility enables comprehensive EFTEM analysis in life science, polymer, and material science research.
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