The ULTRA 55 represents the latest development in
GEMINI technology. Based on the SUPRA
55, the ULTRA 55 now comprises a fully integrated
Energy and angle selective Backscattered electron
(EsB) detector. The ULTRA 55 offers ultra high resolution
for both SE to image surface information and BSE
to present compositional information. The new EsB
detector features an integrated filtering grid to
enhance image quality and requires no additional
adjustments.
Combining several instruments in one, the SUPRA
55VP with the improved GEMINI column is a true
nanoscience FESEM. It provides ultra high resolution
imaging over the complete voltage range with the
ability to handle large awkwardly shaped specimens.
It is also a fully analytical FESEM with up to 20nA
probe current available and comprises variable pressure
technology for examining non-conducting specimens
without prior time consuming preparation.
Versatile High Vacuum,
Extended Variable Pressure and Extended Pressure
The EVO series scanning electron microscopes
(SEM) has been designed to deliver the most informative
images in all applications. Applications like materials
development, quality control, forensics, MEMS, lithography,
life and bio sciences, archeological etc. all benefit
from the compact column design and advanced imaging
modes. Class-leading X-ray analysis capabilities
makes the EVOŽ most effective analytical SEM currently
available.
The all new LIBRA range of Energy Filtering
Transmission Electron Microscopes (EFTEM) combine
state of the art electron optics with unique Koehler
illumination, OMEGA In-column energy filtering,
extremely stable digital electronics and genuine
ease of operation through the WinTEM graphical
user interface (GUI). The LIBRA 200 FE is the
first EFTEM combining the new In-column corrected
OMEGA energy filter, the unique Koehler illumination,
and a highly efficient field emission emitter. The
excellent performance ensures that the operator
obtains optimum results in semiconductor, materials
analysis and life science research.
The all new LIBRA range of Energy Filtering
Transmission Electron Microscopes (EFTEM) combine
state of the art electron optics with unique Koehler
illumination, OMEGA In-column energy filtering,
extremely stable digital electronics and genuine
ease of operation through the WinTEM(TM) graphical
user interface (GUI). The LIBRA 120 EFTEM,
with a LaB6 or Tungsten source, provides excellent
image contrast even from thick or unstained thin
specimens. The optimum detector flexibility enables
comprehensive EFTEM analysis in life science, polymer,
and material science research.
Based
on the high performance automation platform
of SIINTLs SMI3000SE/TB Double Beam/Triple
Beam platform, this new product is equipped
with the GeminiR electron optics of Carl
Zeiss NTS to offer 3 nm SEM resolution and
4 nm SEM resolution. Inheriting all the
user-centric functionality of the SMI3000
series, XVision 300 is an essential tool
for process monitoring in cleanrooms as
well as for wafer-level failure analysis
in the wafer fab laborato-ries.
NVision
40
FIB-SEM Cross
Beam System
As
a laboratory tool compatible with samples
below 100nm, this system is designed to
be used in wide range of fields including
material analysis, semiconductor and life
science. Equipped with SIINT FIB column
and Carl Zeiss EB column, it enables high-quality
TEM sample preparation and high throughput
performance.
The CrossBeam series combines the unrivalled
imaging capabilities of the GEMINI field emission
column with the sophisticated Canion focussed ion
beam. This makes the CrossBeam series the ultimate
3-D research tool for material analysis and semiconductor
metrology applications.
