1. History & Development
of SPM (1)
1981: SPM developed
Dr. Gerd K. Binnig and Dr. Heinrich Rohrer of IBM Zurich Research
Laboratory successfully conduct the world's first STM (Scanning
Tunneling Microscope) atomic image observation (Si 7x7 structure).
STM atomic image of Si (7 x 7)
1985: AFM developed
Developed by Dr. Binnig of IBM Zurich Research Lab and Dr. Calvin
F. Quate of Stanford University
2. History & Development of SPM (2)
1986: Dr. Binnig and Dr. Rohrer awarded
Nobel Physics Prize along with Ernst Ruska,
who designed the first electron microscope.
1986: First atomic image observation (NbSe2) conducted in Japan
at the Electrotechnical Laboratory (technical cooperation/researchers
provided by Seiko Instruments Inc.)j
Atomic image of NbSe2
3. History of Seiko Instruments Inc.
SPM
1985: Begins STM research and development
under supervision of Electrotechnical Laboratory
(EL).
1986: Successful atomic image observation (HOPG)
Atomic image of HOPG
1988: STM hits the market
1990: SPI3600 goes on the market
1991: AFM goes on the market
1993: SPI3700 goes on the market
1996: SPI3800 goes on the market
1998: SPI3800N goes on the market
4. SPM Observation Examples
Silicon single atom step
Direct observation of human red blood cell
5. SPM Features
•Simultaneous high-magnification observation
of 3-dimensional shape and properties
•Measurements in various environments
•Evolving, cutting edge technology
6. Simultaneous High-Magnification Observation
of 3-Dimensional Shape and Properties
Simultaneous observation of magneto-optical disk's 3-dimensional
shape and magnetic image
STM atomic image of graphite (20 million fold magnification)
7. Measurements in Various Environments
In solution, vacuum, atmosphere, low temperature,
high temperature, humid, electric field,
magnetic field
Observation of living cell in culture (Human lung cancer)
8. Evolving latest technology
•Observation equipment -> observation/analysis
equipment -> observation/analysis/processing
equipment
•3-dimensional shape observation AFM/STM
•Surface property analysis FFM/MFM/KFM/SNOAM
•Processing (Micro manipulation)
 
AFM lithography by AFM anodic oxidation (vector scan)
|
Back