New SPM technology, greatly improved operability and measurement function, high end specification next generation control station, in order to support diversification.
Small general-purpose multi-function unit that is able to easily perform high resolution observation in air and liquids. By employing a low coherent optical system and heat source control mechanism, better resolution, lower drift, and reduced light interference is acheived.
An environment control type SPM that supports various measurement environments including air, vacuum, and liquids. In addition to observing shape or properties of material surfaces in various temperature environments, it is able to use a surface change temperature monitor function to quantitatively evaluate changes in surface properties by a process that continuously changes temperatures.
This unit automatically performs multipoint measurements on samples up to 6 inches (8 inches) in size. The Accurate scanner and low coherence optical system further increase the measurement accuracy of this highly sensitive unit.
