* SIS (Sampling Intelligent Scan) mode:
The scan mode in which the probe approaches to the sample
only while acquiring data. By combining this scan mode and
carbon nano-probe, high aspect surface shape can be accurately
measured. Excellent in probe wear durance.
Equipped with SII NanoTechnologyfs unique scan method gSIS
modeh, now samples with narrow aperture (less than 50nm)
or high aspect shape can be accurately measured. Measurement
accuracy increases by combining this SIS mode and carbon
nano-probe.
Measurement example of high aspect sample:
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|
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Nanoimprint mold created by electron
beam exposure
(Sample
provided by courtesy of Matsui Laboratory, University
of Hyogo) |
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Sample size: hight 320nm, aperture
width 50nm |
Closed loop scanner function achieves the reduction of influence
by hysteresis and creep. Now, measurement precision in the
field of minute measurement and processing is significantly
improved and no need for data correction required. This
mode is standard equipped with L-trace, and available for
SPA-400 users as option.
Usability has been improved by installing the measurement
navigation function based on the latest PC control. This
navigation function that had been available only with SPM
unit with auto-cantilever switching function, is now available
with every SPM unit. By following the navigation window,
inexperienced operator can conduct a stable measurement.
Without manual, you can complete all the adjustments and
settings from preparation of the equipment to data saving
and printing.
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Measurement navigation window |
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Position monitor |
With recipe measurement function, automatic multi-point
measurement within maximum scan area is possible. Setting
for repeatability measurement in routine work is much easier
than ever. From color adjustment to graphic treatment, analysis
and printing, all these process can be completed with one
click operation.
The analysis software has been also improved. The superposition
function and display setting function has been newly installed
to serve the demand for image processing in simultaneous
measurement, dramatically improving the function and ease
of operation.
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Recipe setting window |
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Superposition of SPM images |
Contact
For more information, contact our sales department:
