| Overview |
High
resolution measurement is now possible with this probe station
compliant with closed loop scanner and SIS mode. Enhancement
of navigation function and automatic measurement function
improves ease of use. |
| Features |
1.
Ease of use enabled by measurement navigation functions.
2. Automatic multi-point measurement and analysis functions
3. Unique scanning method (SIS-mode) that achieves the measurement
of deep or narrow grooves of high aspect ratios, and less
cantilever wear
4. A closed-loop-scanner function that brought a significant
precision improvement in the field of minute measurement and
processing
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