| |
Standard |
Options |
| X/Y scan voltage |
±200V/18bit |
|
| Z scan voltage |
±200V/21bit |
|
| Simultaneous measure |
8192 x 1024 x 4 screen |
8192 x 8192 x 4 screen |
| Scan routation |
±180 (0.1° step) |
|
| Rectangle scan |
1:1, 2:1, 4:1, 8:1, 16:1, 32:1, 64:1, 128:1, 256:1, 512:1, 1024:1 |
2048:1, 4096:1, 8192:1 |
| Function |
• Auto gain control
• Zscan limiter |
• Closed loops control
• Active Q function
• SIS mode |
| Software |
• Image menu
• Image overlap function (Shape/Physical property)
• 2 sgnal force curve measurement
• Auto measurement recipe function
• Data analysis batch process function
•3D display function
• Surface roughness analysis (Rm, Ra, depth, surface area etc.)
• Cross section analysis, Average cross section analysis
• Multiple function simultaneous cross section analysis (supports 2 to 4 screens)
• Supports surface roughness JIS standard (JIS R 1683: 2007)
• Probe evaluation function
• Line editor function
|
• Auto cross section profule analysis (groove width, pitch, angle analysis)
• Motphology filter function
• Expansion particle analysis (particle diameter, particle surface, number of particles, etc.) |
| OS |
Windows® XP |
|
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