SPA-300HV, Environment Control Unit

Name Environment Control Unit
Type SPA-300HV
Overview This unit is designed for more advanced SPM experiment. It is capable of SPM operation in a vacuum degree of up to 10-5 Pa, and is best suited for use in heating and cooling experiments. Because the concept of SPA-300HV is the same as that of the basic unit, it is compatible with all of the basic unit's measurement modes such as MFM, LM-FFM, VE-AFM.
Features 1. Due to the optical system setting outside of the environmental chamber, fine adjustments suited for each measurement can be made, including adjusting for drifts caused by vacuum evacuation.
2. Even after vacuum evacuation, sample and cantilever can be observed with a high magnification optical microscope from directly above, simplifying the measurement position assignment.
3. The ability to obtain accurate measurement point is assured by moving the samples, even in vacuum, in µm-order resolution by operation with a mouse.
SPA-300HV Environment Control Unit
Specifications
Detection system Optical lever method, Laser Diode and Quadrant Photo-detector
Vacuum level up to 10-5Pa
Resolution Atomic resolution
Sample Size Maximum diameter: 25 mm; maximum thickness: 5mm
Sample Movement Mechanism X-Y Stage (±5mm)
Scan Range Standard 20µm, Max 150µm (optional)
Temperature control -120 to 800°C
Anti-vibration mechanism Air suspension type Anti-vibration Table (with Auto leveling function)
Vacuum Exhaust System Magnetic floating type TMP (300L/sec) available, Direct connection type RP (250L/min)
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