| Detection
System |
Optical
Lever Method
Self-sensitive System (optional) |
| Optical System |
Low coherence
optical system |
| Scanning
system |
Closed
loop scanner with internal triaxial sensor (optional) |
| Resolution |
Atomic
level resolution |
| Drift |
0.01 nm/sec
or less |
| Sample Size |
Maximum
diameter: 35 mm; maximum thickness: 10 mm |
| Sample Movement
Mechanism |
X-Y Stage
(5 mm)
Impact stage (optional) |
| Scan Range |
20 µm
(standard), 150 µm (optional) |
| Optical microscope
(Optional) |
Metallurgical
microscope (reduces differential interference)
Standard optical microscope
Zoom microscope
Simplified microscope |
| Functions |
AFM, FFM,
DFM, PM (standard)
SIS, LM-FFM, VE, Adhesion, CURRENT, SSRM, SNDM, PRM, KFM,
SMM, EC (optional) |
| Other features
|
Recipe
registration for automatic measurement
SIS mode (optional)
Cantilever evaluation (optional) |