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Standards |
Options |
| Detection system |
Low coherent optic lever method
4 part phase detection system |
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| Resolution |
Atomic resolution |
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| Sample size |
35mm, thickness 10mm |
Supports thickness up to 20mm by raising block (option) |
| Scan range |
Standard: supports 20um x 20um/1.5umH |
Supports 100um x 100um/15umH
Supports 150um x 150um/5umH
Supports 110um x 110um/6umH (closed loop control) |
| Positioning microscope |
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Simple microscope (×200 mag)
Optic microscope (×1000 mag)
Zoom microscope (×700 mag)
Metal microscope (with differential interference)(×2000 mag) |
| Measurement functions |
AFM (Contact)
DFM, PM (Phase)
FFM (Friction)
MFM (Magnetic force) |
SIS mode
LM-FFM (Traverse vibration friction)
VE-AFM/DFM (visco-elasticity)
Adhesion (absorption force)
CURRENT
SSRM (Spread resistance)
SNDM (Conductivity)
PRM (piezo-electric response)
KFM (Surface phase)
AFM/DFM insolution
EC-AFM/STM (Electro-chemical)
NanoIndentation (Hardness)
Nano-TA (nano-thermal) |
| Option |
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 |
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| Electro-chemical holder in liquid |
Schale cell |
Sealed environment control cell |
Electro-chemical cell |
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