Features Specification Contact
  Standards Options
Detection system Low coherent optic lever method
4 part phase detection system
 
Resolution Atomic resolution  
Sample size 35mm, thickness 10mm Supports thickness up to 20mm by raising block (option)
Scan range Standard: supports 20um x 20um/1.5umH Supports 100um x 100um/15umH
Supports 150um x 150um/5umH
Supports 110um x 110um/6umH (closed loop control)
Positioning microscope   Simple microscope (×200 mag)
Optic microscope (×1000 mag)
Zoom microscope (×700 mag)
Metal microscope (with differential interference)(×2000 mag)
Measurement functions AFM (Contact)
DFM, PM (Phase)
FFM (Friction)
MFM (Magnetic force)
SIS mode
LM-FFM (Traverse vibration friction)
VE-AFM/DFM (visco-elasticity)
Adhesion (absorption force)
CURRENT
SSRM (Spread resistance)
SNDM (Conductivity)
PRM (piezo-electric response)
KFM (Surface phase)
AFM/DFM insolution
EC-AFM/STM (Electro-chemical)
NanoIndentation (Hardness)
Nano-TA (nano-thermal)
Option
Electro-chemical holder in liquid Schale cell Sealed environment control cell Electro-chemical cell
Electro-chemical holder in liquid Schale cell Sealed environment control cell Electro-chemical cell