| Detection method |
| Optic lever method (Self detection method) |
(Selectable) |
|
| Sanple size |
| Maximum 35mm, Thickness 10mm （20mm when usuing exclusive jig) |
|
|
| Scan range (In-plane/Vertical) |
| 20um□/ 1.5um、 100um□/ 15umH、150um□/ 5umH 110um□/ 6umH （Closed loop control) |
(Selectable) |
|
| Measurement function |
| AFM (Contact mode), FFM (Friction Force mode), DFM (Dynamic Force mode), PM (Phase mode) |
|
|
| Positioning microscope |
| Top observation USB camera, Zoom microscope, Optic microscope, Metal microscope |
(Selectable) |
|
| Vibration isolation mechanism |
| Simple vibration isolation block, Desktop vibration isolation stand, Frame vibration isolation stand |
(Selectable) |
|
| Operation screen |
| Equipped with flow chart format navigation system |
|
|
| Surface roughness measurement |
| Surface roughness JIS standard （JIS R 1683:2007） |
|
|
| Function expandability |
| STM, SIS, LM-FFM, VE-AFM/DFM, Adhision, CURRENT, KFM, PRM, SNDM, SSRM, EFM, MFM |
|
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