Standards Options Detection system Low coherent optic lever method 4 part phase detection system   Resolution Horizontal: 0.5nm Vertical: 0.05nm   Sample size 150mmφ, thickness 22mm / 200mmφ, thickness 12mm (can select sample stage size)   Scan range Standard: 90 um x 90um/6 umH （Accurate scan mount）   Positioning microscope Equipeed with built-in zoom microscope （×285～1100 mag)   Measurement functions AFM (Contact) DFM PM (Phase) FFM (Friction) MFM (Magnetic force) SIS mode LM-FFM (Traverse vibration friction) VE-AFM/DFM (visco-elasticity) Adhesion (absorption force) CURRENT SSRM (Spread resistance） PRM (piezo-electric response) KFM (Surface phase) Option       Soft X-ray irradiation system