| Detection
System |
Optical
Lever Method |
| Vacuum |
up to 10-5
Pa |
| Resolution |
Atomic
resolution |
| Sample Size |
Maximum diameter: 25 mm; maximum thickness: 10 mm |
| Sample Movement Mechanism |
X-Y Stage
(5 mm) |
| X-Y Scan
Range |
Standard
20 um
Maximum 150 um |
| Temperature
Control |
-120 to
300 ºC (Shared heating and cooling), Room temperature
to 800 ºC |
| Vacuum Exhaust
System |
•Magnetic
Floating
Turbo Molecular Pump (2501/sec) •Directly
Connected Rotary Pump (2501/min) |
| Surface transference
temperature monitor |
Thermal-Sweep
Function (FFM/VE capable) |