SmartMRC
contributes to the yield improvement of the mask
and shortening the mask manufacturing and the inspection time.
Features
•Direct input of mask drawing data
-GDS format conversion from the drawing data is not needed
-The whole JOBDECK can be checked
-Direct comparison different kinds of drawing data
•High-speed check of reversed pattern data
-Similar speed as the normal data
•Compression of result data with OASIS format
-Result files can be output as OASIS
•High speed processing and small memory consumption
-Distributed computing available
-Linear processing efficiency up to several tens of CPUs
-Small memory consumption
-Data size independence
