High
resolution measurement is now possible with this
probe station compliant with closed loop scanner
and SIS mode. Enhancement of navigation function
and automatic measurement function improves ease
of use.
The multi-function S-image makes it easy to perform high resolution observations in air and liquids. The S-image employs a low coherence optic system and thermal correction to increase resolution, lower drift, and reduce optical interference.
The
SPA-400 comes standard with AFM and MFM. Optional
KFM, VE-AFM STM and other types of measurement can
be performed through easy cantilever exchange.
This unit, in addition to observing the topography
and properties of the surface of substances in
various temperature environments, is equipped
with a surface transference monitor function that
quantitatively evaluates changes of surface properties
as the temperature continuously changes.
This
unit is designed for more advanced SPM experiment.
It is capable of SPM operation in a vacuum degree
of up to 10-5 Pa, and is best suited
for use in heating and cooling experiments. Because
the concept of SPA-300HV is the same as that of
the basic unit, it is compatible with all of the
basic unit's measurement modes such as MFM, LM-FFM,
VE-AFM.
The
Review Station AFM unit can detect the position
of 0.08µm level defects on a wafer accurately
and in a short time. By using the coordinate data
linkage and the super accurate position determination
mechanism enabled by laser dispersion, observation
of fine particles and defects in bare wafer is enabled.
This unit automatically performs multipoint measurements on samples up to 6 inches (8 inches) in size. The Accurate scanner and low coherence optical system further increase the measurement accuracy of this highly sensitive unit.
