1.Introduction
Over twenty years have passed since ICP Mass
Spectrometer (ICP-MS) was first introduced by R.S.
Houk, A.L. Gray et al. in 1980, then put on the
market in 1983, and is now widely used in various
fields. This is especially so in the semi-conductor
industry, as ICP mass spectrometry is used as analysis
method for quality control of high-purity material,
where demands increase with the times. Also, it
is expected that the method can be applied to analysis
of trace amounts of hazardous metals, and recently
with various legislations in the environmental
field, ICP-MS is used to respond to the stricter
environmental and drainage standards.
ICP-MS offers the following features:
1. High sensitivity analysis - lower detection limits of most elements
are in ppt to ppq-order.
2. Simultaneous multi-element analysis possible.
3. Can determine quality and quantity quickly.
4. Wide dynamic range with 8 figures.
5. Isotope comparison possible.
2. Structure of ICP-MS
As shown in Figure 1, ICP-MS consists of an ion
source (ICP), a sampling interface, ion lens, a
mass spectrometer and a detector.
Figure 1: ICP-MS Structure
The ion source, ICP is an ideal ionization source
for mass spectrometry, and can ionize over 90%
of many elements. Ions produced in the ICP are
led through the sampling interface to the mass
analysis unit. The sampling interface unit consists
of two metallic cones, the sampling cone (orifice
radius about 0.5 to 1mm) and the skimmer cone (orifice
radius about 0.5 to 1mm), and a rotary gear pump
ventilates between the two into several hundreds
Pa condition. The path of the ions pulled through
by the sampling cone and the skimmer cone converge
into the mass spectrometer through the ion lens.
The ion lens and the mass spectrometer unit are
ventilated to 10-3 and 10-4 Pa respectively, by
the turbo molecular pump. The ions sorted by mass
with the mass spectrometer are detected by the
ion detector.
3. Application
3-1 Infinitesimal Concentration Analysis
One problem with ICP-MS is the spectral interference
that occurs when the spectrum of ions or molecular
ions with the same mass number as the objective
element overlap and interfere. Spectral interference
can be categorized as follows:
1. Molecular ions from Argon (ArO, ArH, ArOH, ArN, ArCl, ArC, ArAr etc)
2. Molecular ions from major component elements in sample (CaO, CaOH,
NaO, NaOH etc)
3. Molecular ions caused by sample liquidity (ClO, SS, NO etc)
Especially in the case of 1., where
Argon (Ar) contained in plasma gas is a main cause,
interferes evenly with any sample. Accordingly,
measurement of elements interfered by Ar molecular
ions is conducted in a high background condition,
making infinitesimal concentration measurements
extremely difficult.

Chart 1: Major Ar molecular ions
Chart 1 shows major elements affected by molecular
ions of Argon origin. K, Ca and Fe are especially
affected, as the Ar molecular ion levels for these
elements range from tens to hundreds of ppb when
converted to the concentration for each element,
and ppt-order analysis under these conditions are
nearly impossible. Cool Plasma Measurement addresses
the problem of infinitesimal concentration analysis
for elements affected by Ar molecular ions. As
its name suggests, Cool Plasma refers to the lower
than normal temperature of the plasma. Ar molecular
ions are difficult to be produced in a cool plasma
state and the background becomes as low as possible.
As a result, the lower detection limit improves.
Chart 2 shows detection limit (DL) and the background
equivalent concentration (BEC) under cool plasma
conditions. The background level is reduced to
1ppt or lower, making ppt-order analysis possible.
| Element |
Mass Number |
DL(ppt) |
BEC(ppt) |
| Na |
23 |
0.05 |
0.07 |
| Al |
27 |
0.05 |
0.03 |
| K |
39 |
0.18 |
0.57 |
| Ca |
40 |
0.19 |
0.71 |
| Fe |
56 |
0.28 |
0.54 |
| Cu |
63 |
0.09 |
0.08 |
DL: Concentration calculated by multiplying
the repeated measurement result of the blank by
3
BEC: The blank value converted to concentration
Chart 2: Detection Limit and Background with Cool Plasma
3-2 Application in Environmental Sample Measurement
Environmental samples such as stream water and
lake water contain many matrix components in addition
to the measured elements. Therefore, many problems
occur when measuring these matrix components with
ICP-MS.
One is the spectral interference mentioned in the Cool Plasma description.
Cool plasma can reduce molecular ions of Argon origin, but at the same
time increases the molecular ions of elements contained in the sample.
Also, because there is a strong desensitization effect due to the matrix,
it cannot be practically used for environmental samples. Therefore, spectral
interference must be reduced using other approaches. There are several
forms to molecular ions and molecular ions of oxides have an especially
large effect. A large percentage of oxide ion are produced from the oxygen
of water (H2O) contained in sample. Therefore, reducing the water content
of a sample can significantly lower the production of oxides. Also, plasma
conditions and sampling interface shape in the vacuum unit can dramatically
change the production rate of oxides, so optimizing these conditions
can lower the production of oxides.
SPQ9000 employs a trace amount nebulizer (lowers water content), a spray
chamber cooling (drains water), a plasma torch for environmental samples
(sets plasma conditions to make production of ions difficult) and cones
for environmental samples (reduce molecular ion production) to make measurements
with little spectral interference possible.
Chart 3 shows a standard stream water measurement on sale from Japan
Society for Analytical Chemistry

Chart 3: Stream Water Analysis
3-3 Combination with Chromatography
Hazardous elements such as arsenic, chromium
and bromine have varying toxicity based on their
chemical form. Measurement with ICP-MS can only
be used to acquire information on total concentration,
not toxicity. Recently, techniques that combine
ICP-MS with chromatography equipments such as Ion
Chromatography (IC) and High-Performance Liquid
Chromatography (HPLC) have received attention.
In these cases, ICP-MS is used as the detector
for the chromatography equipment, enabling higher
sensitivity than using chromatography equipment
alone. Here, we will introduce an example of a
simultaneous analysis of bromate ions and bromic
ions in tap water using a combination with IC.
Bromic ions themselves are not hazardous, but
if ozone treatment is used to disinfect tap water,
a byproduct, bromate ion is produced. Bromate ions
are hazardous, so it is important to determine
how much bromine is contained as bromate ions.
DX-500 by Dionex Corporation was used as IC.
Figure 2 shows the measurement results of bromic and bromate ions when
ICP-MS is combined with IC.

Figure 2: Measurement Results of Bromic
and Bromate Ions When Combined with IC
| |
IC |
IC+ICP-MS |
IC+ICP-MS |
| Injection Rate (uL) |
200 |
200 |
500 |
| Bromic Ions |
0.8 |
0.09 |
0.02 |
| Bromate Ions |
0.5 |
0.11 |
0.02 |
unit: ug/L
*Detection in IC technique using
conductivity detection.
Chart 4: Detection Limit When IC
and ICP-MS Are Connected
When the injection rate was increased to 500uL,
the detection limit was over 20 times better when
compared to using IC alone.
|