HOTSCOPE, Mask Data Preparation Software

Name	Mask Data Preparation Software

Type	HOTSCOPE

Overview

With acceleration of miniaturization and high accumulation of devices, dummy patterns and complicated OPC patterns are now widely used, resulting in increase of data volume. HOTSCOPE is an excellent data browser, displaying such huge-sized layout data and photomask data quickly and precisely regardless of its view magnification. This high-performance data browser improves efficiency in checking dramatically increasing LSI data.

Features

1. HOTSCOPE is capable of handling large volume files over 2GB or Jobdec files containing more than thousand files in a short time.
2. By creating cache, HOTSCOPE reduces time for re-opening the same file. This function allows efficient data inspection for multi-time checking and multi-user checking.
3. Hotscope displays data in various format and Jobdecs on the same screen. Comparison of design data (GDS) and mask data, or plot data and inspection data in different format can be achieved easily.
4. Various functions required in data checking and measurement function are installed as well as functions for display setting and controlling.
5. Construction of a system that enables access to the HOTSCOPE data via internet is available, supporting information sharing within a company.

Specifications

Functions

Multi file open, File search, Cell/cell name/ figure search

Overlapping display of data (any combination of layout pattern and Jobdec) with scale factor (Mirror/rotation/reflection)

Multi windowing, coloring and filling for layer/pattern/frame

Measuring (corner, side, figure, cell frame, critical dimension, etc)

Error trace (Calibre/error log interface)

MACRO(scripting, user dialog)

GDS cutting out

Assist line (X/Y/XY line, slant line, circle, and step by step assist lines)

Area calculation (area and area ratio)

Bitmap operation (or/ and/ xor, not, or+, and+, xor+ not+)

Cassette/ Pellicle viewing

Job title viewing, arbitrary overlap viewing, original data viewing for array data, field/stripe viewing, shot rank information, etc)

Printing support (image output, save window image, etc)

CD measurement script generation

Remote viewing

Format

MEBES (MODE I/II, EXT, RETICLE, MODE5) Pattern/Job

HL(700/ 800/ 950) Pattern/Job, HL7000 Pattern/Job

VSB11 Pattern/Job, VSB8 Pattern/Job, Toshiba EB Format (Ver.1.0, Ver.20.0)

JEOL (6AIII/ 700MV/ 9000MV) Pattern/Job

MIC data, MANN data

GDS-II (512 Layer, 256 Data Type)

Calibre/Error file

Platform

SUN Solaris7 or later

RedHat Linux Version 7.3 or later