Based on the high performance automation platform of SIINTLs SMI3000 series, this new product is equipped with the SIINT's latest FIB column and Gemini column of Carl Zeiss, achieving highly precise processing with less damage compared with conventional models, and 3nm SEM resolution.

As a laboratory tool compatible with samples below 100mm, this system is designed to be used in wide range of fields including material analysis, semiconductor and life science. Equipped with SIINT FIB column and Carl Zeiss EB column, it enables high-quality TEM sample preparation and high throughput performance.

This FIB system meets wide range of needs, from high resolution observation, processing to lamella preparation of various material. It can conduct highly precise observation and processing at high speed.

This system is effective for backside analysis of devices and position determination on CMP sample for FIB processing. Infrared observation enables the observation of the device from the backside through silicon substrate. Laser marking and coordinate linkage to the defect point detected with defect inspection equipment is also possible.