Based on the high performance automation platform of SIINTLs SMI3000 series, this new product is equipped with the SIINT's latest FIB column and Gemini column of Carl Zeiss, achieving highly precise processing with less damage compared with conventional models, and 3nm SEM resolution.
FIB-SEM hybrid system equipped with SIINT's latest FIB column and Gemini SEM
colulmn of Carl Zeisss, and FIB-SEM-Ar Triple Beam system equipped with ultra low kV Ar column which can handle the small sample to 200mm wafer deliver such as high quality TEM sample preparation, Cut&See realtime high resolution obervation and 3D analysis, and EDS analysis.
SMI4050 is the high performance Focused Ion Beam system. Equipped with
new optics, the SMI4050 provides world-leading SIM imaging resolution and high definition TEM sample preparation by improved imaging resolution at low kV.