Based on the high performance automation platform of SIINTLs SMI3000 series, this new product is equipped with the SIINT's latest FIB column and Gemini column of Carl Zeiss, achieving highly precise processing with less damage compared with conventional models, and 3nm SEM resolution.

FIB-SEM hybrid system equipped with SIINT's latest FIB column and Gemini SEM
colulmn of Carl Zeisss, and FIB-SEM-Ar Triple Beam system equipped with ultra low kV Ar column which can handle the small sample to 200mm wafer deliver such as high quality TEM sample preparation, Cut&See realtime high resolution obervation and 3D analysis, and EDS analysis.

This FIB system meets wide range of needs, from high resolution observation, processing to lamella preparation of various material. It can conduct highly precise observation and processing at high speed.