| Name |
Hybrid FIB-SEM System |
| Overview |
FIB-SEM hybrid system equipped with SIINT's latest FIB column and Gemini SEM
colulmn of Carl Zeisss, and FIB-SEM-Ar Triple Beam system equipped with
ultra low kV Ar column which can handle the small sample to 200mm wafer
deliver such as high quality TEM sample preparation, Cut&See realtime high
resolution obervation and 3D analysis, and EDS analysis. |
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