SOM3355-IR
Infrared Observation Optical Microscope with Laser Marking Function
Name Infrared Observation Optical Microscope with Laser Marking Function
Type SOM3355-IR
Overview This system is effective for backside analysis of devices and position determination on CMP sample for FIB processing. Infrared observation enables the observation of the device from the backside through silicon substrate. Laser marking and coordinate linkage to the defect point detected with defect inspection equipment is also possible.
Features 1. Infrared(Wavelength: 1µm)/visible observation (Display magnification: 3200-fold with 17-inch monitor)
2. Laser marking function (Wavelength: 532nm / 355nm)
3. Equipped with a specimen stage compatible with 300mm wafer (X, Y, R)
Sample holders can be shared with SMI series.
4. Effective for removing polyimide film (Wavelength: 355nm).
5. Optional software allows linkage with coordinate data from the inspection tool, enabling navigation to the objective defect.
6. Optional software enables linkage with CAD layout data. Specimen stage shifts along with coordinate alignment.
Infrared Observation Optical Microscope with Laser Marking Function, SOM3355-IR
Specifications
Laser 532nm or 355nm 
Objective Lens Long-WD
Objective Lens magnification x5, x20, x50, x100: for Near-Infrared
x50: for Near-UV
Specimen Stage compatible with 300mm wafer (X, Y, R)
Sample holders can be shared with SMI series
Linkage function with SMI series Compatible with 50mm, 200mm and 300mm
Auto-focus system
Digital CCD Camera compatible with infrared observation
Standard Options
Inspection Tool Linkage Function
CAD Navigation Linkage Function
Back to product top to inquiry page Close This Window