SmartOASIS, Mask Data Preparation Software

Name Mask Data Preparation Software
Type SmartOASIS
Overview Due to the recent increase of OPC patterns in accordance with sophistication, high accumulation and miniaturization of LSI, size of design data and mask data in GDS format are dramatically increasing, resulting in appearance of data in GB order.
Increase in time for handling and transitioning data, and storage of large volumetric data are becoming serious problems. SmartOASIS that enables data transition from GDS format to OASIS format and check of the transitioned data, resolves problems related to increase of data volume.
Features 1. Features
Ultra high speed (A few minutes for GDS to OASIS conversion of GB data)
High compression rate (1/10 to 1/800)
Format check, Correspondence check function with GDS data
CBLOCK support
Compatible with OASIS and VSB with EB plot constraint

2. Benefits
Minimizes cost for data storage and networking resources
Reduces time for data backup and restoration
Reduces data transition time and network cost, achieving high reliability
Saves license cost of EDA tools

* About OASIS format:
OASIS format is the next generation design format registered as SEMI standard.

Data expression methods such as flexible length integer, delta expression of coordinates, modal variables and repetition of geometry enable 20 times smaller data compression compared to GDS format.
SmartOASIS Mask Data Preparation Software
Specifications
Tools
Gds2oasis GDS to OASIS conversion
Oasis2gds OASIS to GDS conversion
Oasis check Format check of OASIS files
Oasismake Text file to OASIS conversion
Oasisdump OASIS to text file conversion
Ogdiff Comparison between GDS and OASIS
Oasiscount Count of number of figures
Oasisblock OASIS CBLOCK specification data compression
Oasisdecblock OASIS CBLOCK data decompression
Onecheck

OASIS.VSB (new reticle writer data format) restriction check

Environment
Solaris 64bit OS of Solaris 7 or later
Linux RedHat 7.2 or later
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