SPA-500, Large Stage SPM Unit

Name Large Stage SPM Unit
Type SPA-500
Overview SPA-500 is designed with rigidity thoroughly in mind. This large stage SPM unit is capable of reviewing samples of up to 6 inches while achieves high resolution comparable to a smaller size unit.
Features 1. Easy operation with Beginners Mode enables untrained users to perform perfect operations such as cantilever exchange, data gathering, image processing, analysis and printing.
2. Semi-automated cantilever exchange and laser adjustment provide reliable operation.
3. Recipe registration mechanism makes multi-point measurement possible. Maximum of 20 locations on one spreadsheet with separate measurement conditions can be registered and automatically measured. Complex program editing is unnecessary.
4. Various Measurement Modes:
AFM, DFM, Phase Mode and the Magnetic Force Microscope (MFM) are standard equipped and also such as Micro Visco-Elasticity AFM/DFM, Lateral Modulated FFM, Surface Electric Potential Microscope (KFM), AFM/Current Simultaneous Measurement, and AFM/CITS are available as options.
SPA-500 Large Stage SPM Unit
Specifications
Detection system Optical Lever Method,Laser Diode and Quadrant Photo-detector
Resolution Horizontal 0.5nm, Vertical 0.05nm
Sample Size 150mmφ (200mmφ optional)
Sample Movement Mechanism High Accuracy Movement X-Y Stage
Scan Range 90µm
Other Probe Diagnostic Function available
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