L-traceII, Large Stage Unit

Name	Large Stage Unit

Type	L-traceII

Overview

This unit automatically performs multipoint measurements on samples up to 6 inches (8 inches) in size. The Accurate scanner and low coherence optical system further increase the measurement accuracy of this highly sensitive unit.

Features

1. The new Accurate scanner reduces Z-axis straightness errors so that the angular difference of the lateral walls is 1° or less.

2. The new low coherence light source improves the S/N ratio and reduces light noise.

3. Heat control reduces drift (less than 1/4 of the previous L-trace).

4. The installed closed loop scanner minimizes the influence of hysteresis and creep.

5. Automatic cantilever exchange and evaluation improve operability.

Specifications

Detection System	Light reflection system
Optical System	Low coherence optical system
Scanning system	Accurate scanner (Vertical Z-axis), Closed loop scanner with internal triaxial sensor
Resolution	Horizontal: 0.5 nm Vertical: 0.01 nm
Sample Size	Diameter: 150 mm (6 inches), thickness: 22 mm; Diameter: 200 mm (8 inches), thickness: 12 mm
Stage Mechanism	High accuracy motorized stage X: ±75mm Y: +105, -5mm Z: 22mm (6 inches), 12 mm (8 inches)
Scan Range	90 µm
Optical microscope (Optional)	High magnification mode: Approximately 270 to 1100 times (9 inches monitor), 0.2 to 0.8 mm (diagonal) Low magnification mode: Approximately 155 to 620 times (9 inches monitor), 0.35 to 1.4 mm (diagonal)
Functions	AFM, FFM, DFM, PM (standard) SIS, LM-FFM, VE, Adhesion, CURRENT, SSRM, PRM, KFM, SMM (optional)
Other features	Automatic cantilever exchange Automatic cantilever diagnostics (optional) Recipe registration for automatic measurement Supports SIS mode (optional) Cantilever evaluationAutomatic cantilever exchange Automatic cantilever diagnostics (optional) Recipe registration for automatic measurement Supports SIS mode (optional) Cantilever evaluation