"L-trace II" Large Stage Unit

Nanoscale fine processing technologies including optical lithography, electronic lithography and nano-imprinting are attracting attention. L-trace II is an enhanced version of L-trace, a high-precision measurement instruments with an established reputation as a nanoscale fine processing geometry evaluator. The employment of the newly developed accurate scanner and low-coherence optics (an optical system with low optical interference) allows measurement of shapes at the nanometer scale with even higher accuracy and precision. As with its predecessor, L-trace II supports sample sizes of up to six inches (optionally eight inches), and large-sized samples of microlenses and semiconductors can be placed on the holder without cutting them into smaller pieces.

"Main features of L-trace II"

1  Reduced Z-axis rectilinear error by new accurate scanner
With the conventional Z scanners (scanners with vertical control), crosstalk is generated in the directions of the X- and Y-axes during movement along the Z-axis due to the uneven sensitivities of the elements. This has caused an asymmetric sidewall shape in a concave shape such as a trench structure and misalignment of centers of the bottom and top in a convex shape such as a microlens. The new accurate scanner used for the new model is provided with a function to correct the sensitivity unevenness of the elements, which has achieved an angular difference between right and left in a sidewall shape of less than one degree and allowed highly reliable topographic image measurement. In addition, the combination with SII NanoTechnology's unique SIS (Sampling Intelligent Scan) mode raises expectations for applications in industrial fields such as L&S measurement of microlenses and semiconductors.

2  Improved S/N ratio and reduced optical noise achieved by the new low-coherence optical head
Use of a low-coherence (low-optical interference) light source for the optical head that detects the displacement of the cantilever has realized the elimination of mode hop noise in the high output power range and return light noise. The higher power output has improved the S/N ratio and allowed even higher resolution observation in the nanometer scale, on top of which the reduced optical interference noise has achieved more accurate measurement of mechanical characteristics between the sample surface and cantilever.

3  Reduced drift by heat source restriction
The structure with any source of heat eliminated from the inside of the unit has achieved a drift of as low as less than 1/4 of the conventional model. The improvement of the basic performance essential to nanoscale structural analysis has realized even higher reliability. Stable measurement is ensured from the first observation, which helps make the most of the measuring time.

4  Standard equipped closed loop scanner
The conventional open loop scanner has been susceptible to the influence of creep, which causes distortion after frame transition, and lacked repeatability of displacement due to the effect of hysteresis. The closed loop scanner with a displacement sensor mounted on itself has achieved even more accurate positioning and further improved measuring accuracy by comparing the sensor signal with scanner displacement, which is fed back (first employed in L-trace).

5  Improved user-friendliness by automatic functions
The cantilever is consumable and must be replaced according to the service life of the probe. L-trace II is equipped with an automatic cantilever replacement function, which allows anybody to use the tool with ease. The automation of evaluation of a probe that supports high aspect shapes allows easy checking of the measuring accuracy (first employed in L-trace).

L-trace II

Multi-Function Unit "S-image"

S-image is a high-resolution multi-function unit that has achieved even higher resolution, lower drift and further reduced optical interference by the use of the newly developed low-coherence optics and restriction of heat sources. Scanning probe microscopes allow observation of insulating organic materials and biological samples containing water, which are difficult to observe with electron microscopes. S-image has been developed mainly for the research of such organic, polymeric and biological materials on a nanometer level.

"Main features of S-image"

1  Improved S/N ratio and reduced optical noise achieved by the new low-coherence optical head
Use of a low-coherence (low optical interference) light source for the optical head that detects the displacement of the cantilever has realized the elimination of mode hop noise in the high output power range and return light noise. The higher power output has improved the S/N ratio and allowed even higher resolution observation at the nanometer scale, on top of which the reduced optical interference noise has achieved more accurate measurement of mechanical characteristics between the sample surface and cantilever.

2  Reduced drift by heat source restriction
The structure with all source of heat eliminated from the inside of the unit has achieved a drift of as low as less than 1/10 of the conventional model. The improvement of the basic performance essential to nanoscale structural analysis has realized even higher reliability. Stable measurement is ensured from the first observation, which helps make the most of the measuring time.

3  Less influence of hysteresis and creep (Closed loop scanner : optional)
The conventional open loop scanner has been susceptible to influence of creep, which causes distortion after frame transition, and lacked repeatability of displacement due to the effect of hysteresis. The closed loop scanner with a displacement sensor mounted on itself has achieved even more accurate positioning and further improved measuring accuracy by comparing the sensor signal with scanner displacement, which is fed back.

S-image

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