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SII NanoTechnology Inc. has released for sale the SFT9500,
a fluorescent X-ray coating thickness gauge that makes
it possible to measure the thicknesses of films of metal
plating, deposition and suchlike with a high level of
precision.
Measuring and controlling the coating thicknesses and
composition of metallic thin films of plating, deposition
and suchlike used in semiconductors, electronic components
and printed circuit boards is critical in guaranteeing
the functions, quality and cost of the products. These
plated products are required to have a high degree of
functionality, and becoming increasingly miniaturized
and thinly plated. Under these conditions, there is
a market requirement to measure thin films with precision
in the order of nanometers. In addition, the regulations
concerning hazardous substances, as exemplified by the
RoHS directives, are increasing the necessity of composition
analysis in such ultra-thin films and micro spot.
SII NanoTechnology has developed the SFT9500, a fluorescent
X-ray coating thickness gauge that enables the measurement
of micro spot and thin films. The SFT9500 combines the
X-ray focusing optics system (capillary) with the X-ray
source to form an X-ray generating system, making it
possible to irradiate high brilliance X-ray beams at
an actual irradiation of 0.1 mm in diameter or less.
This technique enables measurement of micro spot and
and thin films, such as lead frames, connectors and
flexible boards, where it was difficult with conventional
fluorescent X-ray coating thickness gauge due to insufficient
fluorescent X-ray intensity. In addition, this system
is equipped with a high-count-rate and high-resolution
semiconductor detector. This system makes it possible
to measure minute quantities of hazardous substances
regulated under RoHS & ELV, in addition to the measurement
of the coating thicknesses of plated products.
The fluorescent X-ray coating thickness gauges manufactured
by SII NanoTechnology have been actively sold since
they first went on sale in 1978. The systems have been
sold in Japanfs domestic market as well as overseas,
with a total of more than 5000 units so far.
The SFT9500 has merged technologies that the company
has accumulated over many years: fluorescent X-ray measurement
technology for micro spot and hazardous substance analysis
technology boasting the highest level in the industry.
The SFT9500 is a high-performance fluorescent X-ray
coating thickness gauge that responds to current market
requirements for plating thickness measurement.
Main Features of the SFT9500
1. Measurement of thin films/multi-layered films
The use of capillary enabled the increased high intensity
of micro beams. (0.1 mm in diameter) With gold-plated
thin films, X-ray is detected with intensity of up to
50 times compared with conventional models, and measurement
of several nanometers in thickness is achieved with
high precision. This technology also makes it possible
to simultaneously and high-precisely measure the thickness
of each layer in multi-layered films such as Au/Pd/Ni/Cu,
Au/Ni/Ti/Si and so forth.
2. Mapping function
Mapping function using micro beam makes it possible
to easily and quickly observe the distribution of the
plating thicknesses of the sample as well as the distribution
of specific elements therein.
3. Measurement of hazardous substances restricted by
RoHS/ELV directives
Equipped with a high resolution semiconductor detector
(liquid nitrogen-free), it is possible to detect minute
elements in the sample. The content of regulated hazardous
substances can be measured, such as lead and other materials
in lead-free solder and nonelectrolytic nickel used
in electrical and automotive products.
4. Particle Analysis
The combination of high intensive micro beams with a
high count rate detector enables analysis of particles.
After identifying the spot containing particles in the
sample by means of a CCD camera, X-rays are irradiated
to the specified spot. By comparing the acquired spectrum
from the spectrum of the normal spot, particle is analyzed
qualitatively (Al - U)
5. Data editing functions
MS-ExcelR and MS-WordR are installed as standard.
MS-ExcelR is equipped with statistical processing functions
that enable statistical processing of measured data,
average values, maximum and minimum values, C.V. values,
Cpk, etc.
Microsoft MS-WordR makes it possible to easily create
reports on the results of measurements, including the
sample image.
Specifications
| X-ray Tube: |
Tube Voltage:50
kV, Current: 1 mA |
| Detector: |
Semiconductor
detector (liquid nitrogen-free) |
| Collimator: |
Actual irradiation
0.1 mm in diameter (light focus method) |
| Sample Observation: |
CCD camera (with
zoom) |
| Focus: |
Laser pointer |
| Sample stage: |
220 (X) x 150
(Y) x 150 (Z) mm |
| Filter: |
Electric power
switching (primary: 3 positions) |
| X-ray Station:
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Personal computer;
19-inch LCD monitor |
| Measurement software:
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Calibration curve
method, Film analysis FP method (bulk/thin films) |
| Options: |
Mapping software,
Judgment software for hazardous substances, Spectrum
matching Software and image processing software
Measuring functions: Automatic measurement and
center searching |
| Data processing:
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MS-Excel®
and MS-Word® installed |
| Safety functions:
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Interlocking
sample door, sample collision prevention mechanism
and device diagnostic mechanism |
@
Price
14,500,000 yen (tax excluded)
Sales Start Date
May 1, 2006
SFT9500
Inquiry
Press Contact
Corporate Communications Group
TEL: 03-6280-0061
Product Inquiry
International Sales and Marketing Section
TEL: 06-6280-0066
Online Inquiry
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