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SII Nanotechnology Inc. will release on December 1 two
new models of the SMI3000SE series that combine FIB
(Focused Ion Beam) technology, with SEM (Scanning Electron
Microscope) technology. These new models are compatible
with large wafer samples: the SM13200SE for 200 mm wafer,
and the SMI3300SE for 300 mm wafer. Delivery of SMI3300SE
to major domestic semiconductor device manufacturers
will begin in December, and will extend its distribution
to the global market in 2005.
The SMI3000SE series is now comprised with three models:
SMI3050SE released in spring this year, SMI3200SE and
SMI3300SE, and compatible with wafer samples sized 50,
200, and 300mm.
[Main Features of SMI3200SE and SMI3300SE]
(1) Automatic Cut & See function
This feature is effective when performing automatic
cross-sectional processing of selected area on a wafer
with FIB and automatically conducting SEM cross-sectional
observation. In addition to allow the user to review
the automatically obtained cross-sectional images one
by one, the feature enables three-dimensional observation
when combined with 3D visualization software.
(2) Continuous A-TEM
This feature enables automatic TEM sample fabrication
of multiple selected areas on a wafer when the processing
recipe is registered in advance. The feature permits
unattended continuous automatic processing at night,
thereby improving throughput, enhancing operability
and greatly reducing total cost.
(3) Real-time high-resolution FE-SEM observation
This feature enables real-time high-resolution SEM observation
of the FIB processing status at all times. The feature
is utilized with TEM sample fabrication as well as cross-sectional
SEM observation and elemental analysis.
(4) Linkage with external systems
The positional coordinate linkage function which links
the system with defect/failure inspection systems, CAD
navigation systems and optical microscopes enables simple
identification of processing locations.
(5) Micro-probing system
The micro-probing system allows the user to perform
versatile probing operations of nanometer precision
in a vacuum chamber.
yPricez
SMI3200SE: From 160 million yen SMI3300SE: From
290 million yen |
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yTarget sales amountz
First year for both models: 10 units |
ySale start datez
December 1, 2004 |
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