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June 25, 2004

SII NanoTechnology to supply AFM heads for KLA-Tencor "Profiler"

SII NanoTechnology and KLA-Tencor have established a new business relationship. As a result, SII Nanotechnology will begin supplying its Atomic Force Microscope (AFM) heads for the KLA-Tencorfs next generation IC process profiler AF-LM300. KLA-Tencor has already begun shipment of AF-LM300 to major semiconductor manufacturers.

By utilizing an AFM head designed with SII Nanotechnologyfs enhanced, cutting-edge technology, KLA-Tencor has been able to achieve high reliability and significantly increased throughput when compared to conventional AFMs.

SII NanoTechnology and KLA-Tencor will continue to develop and enhance their cooperative relationship based on their respective state-of-the-art technology and know-how.


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