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 History of SII Nano Technology

   Corporate History  Product History
2007 Yokohama Demonstration Laboratory was established in Yokohama, Kanagawa Prefecture.  
2006 Announced global strategic alliance with Carl Zeiss NTS of Germany to develop and sell products jointly. Introduced FIB-SEM Hybrid Systems jointly developed with Carl Zeiss NTS (XVision 300, NVision 40)
2005 SII NanoTechnology USA acquired the X-ray Detector Business from U.S. Radiant Detector Technologies Introduced world's first FIB-EB-Ar triple beam system (SMI3000TB series)
2005  Company head office moved to Chuo-ku, Tokyo  
2005 SII NanoTechnology USA Inc. was founded in California, U.S.A Introduced a FIB mask repair system compliant with 65 nm node (SIR7000FIB)
2004 SII NanoTechnology (Shanghai) Inc. was founded in Shanghai, China Introduced a hazardous substance measurement software jointly developed with Matsushita Electric Industrial Co., Ltd. (HS Easy)
2004   Introduced a FIB-SEM hybrid system (SMI3000SE series)
2004   Introduced a hazardous substance monitor, using no liquid nitrogen (SEA1000A)
2003 SII NanoTechnology acquired the scientific instruments business of Seiko Instruments through partition of the corporation, and acquired all shares of Epolead Service. Introduced a FIB system with resolution of 4 nm (SMI3000 series)
2003 SII Microscope officially changed company name to SII NanoTechnology Inc.  
2002   Introduced a FIB mask repair system compliant with 90 nm node (SIR5000)
2001   Developed world's first microscopic area coating thickness gauge with 75W high output (SFT9300 series)
2000 Seiko Instruments founded SII Microscope Inc., the predecessor of this company, to develop, manufacture and sell compact probe microscopes. Introduced a Scanning Ion Microscope, FIB resolution of 5nm (SMI2000 series)
1999 Introduced a Simultaneous ICP-OES equipped with CCD detector (SPS5000)
1999 Introduced a compact and portable XRF analyzer (SEA200)
1998   Introduced a multi-function SPM unit (SPA-400)
1998   Introduced a compact tabletop probe microscope (Nanopics)
1996   Introduced a mask repair system compliant with 0.18 design rule (SIR3000)
1995 Seiko Instruments founded Epolead Service Inc. to provide maintenance and service for scientific instrument products and to sell consumables. Introduced thermal analysis system (EXSTAR6000 series)
1995   Introduced an environment control SPM (SPA-300HV)
1995   Introduced a scanning near-field optical/atomic-force microscopy (SNOAM)
1994   Introduced a scanning ion microscope, FIB resolution of 10nm (SMI9000 series)
1994   Achieved the world's first 50µm beam diameter in XRF analyzer for microscopic area (SEA5100)
1992   Achieved the worlds' smallest collimator diameter (50µm) of XRF coating thickness gauge by adopting micro-focus tube (SFT3000 series)
1991   Introduced an Atomic Force Microscope (SFA300)
1991   Introduced a high-speed automatic analysis ICP-OES, equipped with dual monochromator and AI function (SPS4000)
1990   Introduced a probe station compatible with multi-function probe microscope (SPI3600)
1988   Introduced the world's first XRF coating thickness gauge for microscopic area, quipped with in-house semiconductor detector (SFT8000)
1987 Seiko Instruments and Electronics officially changed company name to Seiko Instruments Inc. Introduced Japan's first STM (SAM3000)
1987   Introduced an ICP-OES equipped with vacuum spectrograph (SPS1200V)
1986   Introduced a multi-task thermal analysis system (SSC5000 series)
1986   Introduced a FIB cross section processing/observation system with FIB resolution of 50 nm (SMI8000 series)
1986   Successfully observed an atomic image (NbSe2) with a probe microscope for the first time in Japan, under the guidance of the Electrotechnical Laboratory.
1985   Introduced Japan's first photomask clear defect repair system using focused ion beam (SIR1000)
1983 Daini Seikosha officially changed company name to Seiko Instruments and Electronics Ltd.  
1980  

Introduced Japan's first computer-controlled sequential type ICP-OES (JY-38II)

1979   Introduced the world's first horizontal differential type TG/DTA (SSC560G, SSC560GH)
1978   Introduced a multi-channel ICP-OES (JY48P)
1978   Introduced World's first desktop fluorescent X-ray coating thickness gauge that does not use radioisotopes for use in microscopic areas (SFT155/156)
1978   World's first to introduce computer technology to thermal analysis systems (SSC560)
1974   Introduced Introduced adiabatic scanning calorimeteriSSC510j
1973 Daini Seikosha established the Oyama Unit in Sunto-gun, Shizuoka Prefecture, as a scientific instrument manufacturing plant. Introduced XRF analyzer for analysis of sulfur in oil (SFA130)
1972 Daini Seikosha formed a Scientific Instruments division to manufacture and sell analysis and measurement instruments.  
1971   Developed atomic absorption spectrometer, thermal analysis system, and fluorescent X-ray coating thickness line gauges as its main products.
1970 Daini Seikosha established an internal R&D Center for product diversification, and began research and development in the analysis and measurement instrument business.  
1937 Daini Seikosha Co., Ltd. (predecessor of Seiko Instruments Inc.) was founded as the watch manufacturer for the Seiko Group.  
1881 Kintaro Hattori founded K. Hattori and Co., Ltd. (predecessor of Seiko Corporation), a watch and clock retail store.  
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